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Proceedings of
5th International Conference on Advances in Mechanical and Robotics Engineering AMRE 2017
"CLASSIFICATION OF THIN FILM AND ULTRA THIN FILM DEPOSITION METODS"
BOEV B
D.ANGELOVA
KARTUNOV S.
DOI
10.15224/978-1-63248-123-8-36
Pages
37 - 38
Authors
3
ISBN
978-1-63248-123-8
Abstract: “Classification of thin film deposition methods - deposition of thin films of semiconductor materials plays a major role in many areas, especially research and development.”
Keywords: nanocomposite films, nano-layers, PVD metods, CVD metods, deposition.